|
被测件最大长度
Max. measured length |
150 mm |
工作台行程
Lifting range of worktable
|
5 mm |
| 测杆移动范围 |
0.5mm |
| 分划板刻度范围 |
±50格 |
|
直接测量范围
Measuring range |
5-20μm |
|
分度值调整范围
Adjusting range of grad |
0.05-0.2 μm
|
|
推荐使用分度值Recommended grad |
0.1 μm
|
|
测量压力
Measuring force |
(1.5±0.1) N |
|
仪器示值稳定性
Indication reliability |
0.02 μm
|
|
仪器误差
Indication error
|
数字显示
Digital display |
|
|
最大测量误差
Max.measurement error |
| |
| |
 |
|
n 是格数, i是格值,λ是滤光片中心波长，△λ是滤光片波长误差
n is number of divisions, i is division value △λ is error of wavelength |
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仪器体积
Dimensions
|
280×500×700 mm |
|
仪器重量
Weight
|
40 kg |
标准配件
Standard attachments |
| |
| |
五筋园台Five-Rib circular stage
九筋玛瑙台Agate stage
可调园平台Adjustable planar stage
辅助台Auxiliary stage, fixed
平面测帽Planar contact tip, Ф2
小球面测帽Small spherical contact tip
干涉滤光片 Wavelength filter |
|
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